1064,532和680nm波长的反射-吸收复合型防护膜的研制

Reflective and absorptive anti-laser film for 1064 nm,532 nm,and 680 nm wavelengths

针对1064,532和680 nm波长激光,以聚碳酸酯(PC)为镀膜基底,钕玻璃激光中心波长为1064 nm,采用六分之一加三分之一膜系的反射膜系设计,以氧化锆为高折射率膜层材料,氯化酞菁铝掺杂的氧化硅为低折射率膜层材料,通过溶胶-凝胶法镀21层膜,并在多层反射膜与PC基底之间插入张力匹配层,实现了钕玻璃激光器1064 nm主频和532 nm二倍频波长激光的反射,以及680 nm波长红宝石激光的同时吸收,1064,532和680 nm波长处的透射率分别为1.67%,18.24%和2.4%。

With ZrO2 and AlClP2/SiO2 as high and low refractive index materials respectively, the high reflective film of 21 layers was deposited on well-cleaned polycarbonate substrate via sol-gel process. The film was designed as λ./6-λ./3 typed periodic symmetric coating stacks. Reflection to 1 064 nm and 532 nm lasers was realized. At the same time, absorption to 680 nm laser was obtained. The transmissivity at 1 064 nm, 532 nm, and 680 nm were 1.67%, 18.24% and 2.4% respectively. With this method, anti-laser protection was easily acquired at these three laser wavelengths.