脉冲激光淀积BaTiO_3薄膜的介电与铁电特性

DIELECTRIC AND FERROELECTRIC PROPERTIES OF BaTiO 3 THIN FILMS PREPARED BY PULSED LASER DEPOSITION

用脉冲激光淀积方法在ＳｒＴｉＯ３衬底上制备了ＢａＴｉＯ３／ＹＢａ２Ｃｕ３Ｏ７－δ（铁电／超导）双层膜，Ｘ射线分析表明ＢａＴｉＯ３薄膜是高度ｃ取向的．对ＢａＴｉＯ３薄膜的介电和铁电性能进行了实验研究．观察到铁电薄膜特有的电滞线和蝶型ＣＶ曲线，薄膜呈现出较好的铁电性。

BaTiO 3/YBa 2Cu 3O 7-δ bilayer structures have been synthesized on SrTiO 3 substrates using the pulsed laser deposition technique. The X ray analyses show that the BaTiO 3 films are highly c axis oriented. In the studies of dielectric and ferroelectric properties of the BaTiO 3 films, typical hysteresis loops and butterfly C V plots are observed. The results indicate that the BaTiO 3 films are promising in FRAM and related application fields.