摘要
综述了ZAO透明导电薄膜的光电特性及其导电机理、制备技术与研究现状,认为ZAO薄膜在平板显示、太阳能电池和低辐射器件领域具有广泛的应用前景,要达到工业应用还需对一些关键问题进行系统的研究。
The electrical and optical properties and the conduction mechanisms of Al-doped zinc oxide （ZAO）thin film are summarized in the paper. Preparation techniques and present studying situation of ZAO thin film are outlined, It is believed that ZAO has a wide application prospect in many fields such as flat panel display devices, solar cells and Low-E devices. But some key technological problems must he solved systematically before ZAO thin film is commercially applied.
出处
《真空》
CAS
北大核心
2007年第5期36-38,共3页
Vacuum
关键词
ZAO薄膜
磁控溅射
电阻率
透过率
ZAO thin film
magnetron sputtering
resistivity
transmittance
