摘要
提出了用线性真空规测量小孔分子流流导的方法,该方法利用了线性真空规两次测量压力的比值,避免了真空规测量绝对压力引入的不确定度,从而有效减小了小孔流导的测量不确定度。文章介绍了小孔流导的测量原理、测量装置和测量结果,小孔流导测量的合成标准不确定度为0.29%。
An orifice method is put forward to measure the molecular flow conductance with linear vacuum gauge, which just uses the ratio of two pressure readings to avoid the uncertainty resulting from making use of vacuum gauge to measure the absolute pressure, thus minimizing the measurement uncertainty of flow conductance when passing through an orifice. De- scribes the measuring principle, apparatus used and results. B evaluation, in accordance to the standard, the relative resultant uncertainty of the orifice method is 0.29%.
出处
《真空》
CAS
北大核心
2007年第5期45-47,共3页
Vacuum
关键词
小孔流导
测量方法
线形真空规
不确定度
orifice method
flow conductance
measurement
linear vacuum gauge
uncertainty
