液相法电沉积类金刚石薄膜的结构分析

Micro-structure of diamond-like carbon films prepared by liquid electrodeposition

采用脉冲直流电源,以甲醇有机溶液作为碳源,在低温(60℃～70℃)常压条件下,在(100)硅片上沉积了类金刚石薄膜。用扫描电镜、透射电镜、电子衍射谱和拉曼光谱表征了薄膜的表面形貌和结构。结果表明:类金刚石薄膜致密均匀,表面粗糙度小;Raman光谱在1332cm-1附近有一强峰,与金刚石的特征峰接近;电子衍射谱的分析结果表明薄膜中含有多晶金刚石和石墨碳相。

Diamond-like carbon（DLC）films were deposited on（100）silicon substrates at atmospheric pressure and low temperature（60 ℃～70 ℃）with a direct current pulsed power supply using a methanol solution.The morphology and microstructure of the films were analyzed by scanning electron microscopy（SEM）,transmission electron microscopy（TEM）,transmission electron diffraction（TED）and Raman spectroscopy.The SEM observations showed that the films consisted of fine and compact ball-like grains with about 200 nm～400 nm in diameter.Raman spectroscopy analysis confirmed the diamond structure by the presence of strong peaks around 1 332 cm^-1.The analyzed results of electron diffraction pattern confirmed the diamond 8H and graphite 2H structure in the films.