二元光学在凸非球面零件检测中的应用

Binary component testing the large convex surface

分析使用多种透镜组合成补偿镜对非球面进行背部检验,在各种传统检测方法的基础上,研究了一种新的检测方法——使用二元光学元件(CGH)作为补偿镜来检测大口径凸非球面,从而降低加工精度和减小系统体积.讨论了二元光学的原理和设计方法,并给出设计实例.

Based on the traditional methods,the large convex surface testing method is using the back testing,For this kind of system the compensate lens is more complexity and need high manufacture accuracy.A new idea testing the convex surface is provided by using binary element,the principle and design method is discussed and the example for it is also given.It can make the compensate lens simply.The practical aperture of the convex surface is 500 mm,It is tried to make the binary optic using in the convex surface testing.