应用半导体激光器的尺寸测量系统研究

A DIMENSION MEASURING SYSTEM USING SEMICONDUCTOR LASER

利用光学原理推导了位置尺寸与光学系统参数之间的关系和位置敏感器件PSD与光轴夹角之关系。在此基础上，提出了一种采用半导体激光器作光源，PSD作光电接收器的尺寸测量系统，并通过实验对其精度进行了验证。

From the relevant optical principles the dependency of position and dimension on the parameters of an optical system are derived, in addition to the dependency of a position sensitive detector (PSD) on the angular relationship between optical axes. On the above basis, a dimension measuring system that uses semiconductor laser as its light source and PSD as the receiver, is proposed. Its precision is verified by experiments.