超轻超薄反射镜加工工艺研究

Research on ultra thin mirror fabrication techniques

介绍了国内外在超薄镜加工工艺方面的研究现状,在对已有的加工工艺改进的基础上进行了超薄镜加工工艺的实验研究,获得了预期中的实验结果,发现超薄镜下盘后由于应力释放而产生的形变主要来自像散,在主动调节中应注意对其进行校正。对超薄镜加工工艺实验研究中所获得的一系列经验进行了总结。

Both internal and overseas status of fabrication techniques on ultra thin mirror is introduced. Experiments base on the improvenent of exiting techniques are carried out and anticipated results are achieved. The main distortion of the mirror is find which is caused by release of stress, come from astigmatism. That is adjusted actively. An aerie of experience form experiments of ultra thin mirror fabrication is summarized.