一种基于四象限探测器的深孔直线度测量方法的研究

Study on a straightness measurement method based on the four-quadrant detector for deep hole

介绍了以半导体激光光束为测量基准,采用四象限探测器进行深孔直线度检测的原理和方法。重点针对实际激光器近似于椭圆形状的入射光斑,推导了输出电压与椭圆光斑中心的变化规律,分析了光斑椭圆度对测量误差的影响,论证了方案的可行性与可靠性。

The principle and method of checking and measuring the straightness for deep hole was developed in which the aligned laser beam based on semiconductor is used as the measuring datum axis, four-quadrants detector is used as the position .sensor. For the close to dlipse laser beam, the formula for computing the relation between the output voltage and the beam center was deduced and the influence of the shape of ellipse on the precision was analyzed by detail. The feasibility and reliability of the measurement were demonstrated.