摘要
针对RF-500型CVD镀膜机传统的电气控制缺点,开发了基于PC-PLC的RF-500型CVD镀膜机计算机控制系统。介绍了RF-500型CVD镀膜机的结构以及工作原理;并对该控制系统的硬件结构和软件功能进行了描述。对该控制系统的控制效果进行了大量的实验研究,研究结果表明:基片温度控制精度达到±1℃、工作(反应)气体的流量控制精度达到10mL、可以进行精确的开关量控制。
A PC-based control system is developed for RF-500 chemical vapour deposit （CVD）coating machine in order to overcome shortcoming of traditional control manner.The paper introduces not only the hardware construction and software function of the RF-500 coating machine but also hardware composition and software architecture the new computer contro system.Lots of experiments are perform aiming to obtain satisfactory control effect.The research resoults indicate that temperature control error ±1℃ is obtained and flow control error is 10mL.
出处
《工业控制计算机》
2007年第9期14-15,共2页
Industrial Control Computer
