MEMS器件及在通信的应用

MEMS Devices and Their Application in Communications

电子工业已经成为世界上规模最大的工业。电子器件是电子工业的基础,该领域的发展十分迅速,新器件、新效应、新技术日新月异。半导体器件的特征尺寸已进入微米量级。近年来MEMS(微电子机械系统)器件的出现和发展引起各工业大国的关注。文章介绍了MEMS的主要特点及其在通信领域的应用。

The electronics industry has become the world＇s largest industry. Electronic devices are the basis for the development of electronics industry, whose development is very quick, with new devices, new effects and new technologies everyday. Semiconductor devices are now measured in microns. In recent years the emergence and development of MEMS （micro - electronic mechanical systems） devices have gained concern of industrial countries. The article introduces the characteristics of MEMS and its application in communications.