90°弯管磁过滤阴极弧沉积类金刚石膜的特性分析

Characterization of diamond-like carbon film prepared by 90° bend toroidal duct magnetic filtered cathodic arc

利用动态机械热分析仪研究了四种镁硅合金的阻尼性能.研究表明:铸造镁硅合金具有良好的阻尼性能.并且体现出有别于纯镁的新阻尼特征,铸造镁硅合金具有较纯镁在更大应变振幅范围内的弛豫型内耗.由于Mg2Si对晶界的钉扎作用,界面阻尼峰出现在较纯镁更高的温度.少量钙的添加改善了Mg2Si析出的形态,但对阻尼性能的影响似乎不明显.

Diamond - like carbon （DLC） films were successfully obtained on Si substrate by 90° bend toroidal duct magnetic filtered cathodic arc method. The surface morphology, structure and microhardness of the films were investigated by scan electron microscopy, surface profilometer, Raman spectroscopy and Knoop microhardness tester. As a result, the macroparticles produced by cathode can be effectively filtered by the 90° bend toroidal duct. Substrate bias voltage plays an important role in depositing DLC films. With the increase of bias voltage, the macroparticles become smaller. The higher the bias voltage is, the smoother the surface is. The content of sp^3 bond and hardness decrease with the increase of the bias voltage, and the hardness of the films has the maximum value of 28.5GPa at the bias voltage of- 75v （ion energy of 100ev）.