电极距离对激光电化学刻蚀速率及钻蚀的影响

Influence of Pole Distance on the Velocity and Traverse Etching of Laser Electrochemistry

利用溶液回路电流和红外热像监测,研究了电极距离对半导体激光电化学刻蚀速率和电化学横向钻蚀特性的影响。实验结果表明,电极距离由15 cm缩短为5 cm后,回路电流数值增大,其变化率增加约15.4%,等量化学热生成时间至少缩短2/3,说明缩短电极距离使半导体激光电化学刻蚀速率加快;当电极距离分别为20、15、10和5 cm时,垂直晶向刻蚀50μm直线凹槽,所得凹槽实际宽度分别为100、85、70和60μm,其晶向影响受到明显抑制,横向钻蚀大幅减小。研究结果说明,通过电极距离调节这一简单方式,有可能解决激光电化学刻蚀速度慢、横向钻蚀严重等难题。

The influence of pole distance on laser electrochemistry etching velodty and traverse etching is studied. Experimental results showe that when pole distances change from 15 cm to 5 cm,the loop circuit adds about 15.4% and the time of the equal chemistry heat creation shorten 2/3 at least,it shows that shortening the pole distance can the laser electrochemistry etching rate when pole distance is 20,15,10 and 5 cm respectively, the practice groove width is 100,85,70 and 60μm, it shows, the influence of crystal-orientation can be restrained and traverse etching is reduced greatly. The above results show that ths possible to solve the difficult problem of laser electrochemical etching include traverse and rate by modulation of polar distance.