摘要
介绍了我国半导体设备行业巨大的市场前景和快速发展的良好形势，指出了我国半导体设备行业存在的问题和优势，最后提出了几点促进措施。
In this paper, the great potential market prospect of semiconductor equipment and its good development trend are presented; in addition the problems and advantages of semiconductor equipment industry are pointed out. Finally some promoting measures are put forward.
出处
《装备机械》
2007年第2期18-22,共5页
The Magazine on Equipment Machinery
