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A CO_2 laser rapid-thermal-annealing SiO_x based metal-oxide-semiconductor light emitting diode

A CO_2 laser rapid-thermal-annealing SiO_x based metal-oxide-semiconductor light emitting diode
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摘要 Enhanced near-infrared (NIR) electroluminescence (EL) of a metal-oxide-semiconductor light emitting device (MOSLED) made on CO2 laser-annealed SiOx film is demonstrated. An EL power of near 50 nW from CO2 laser rapid-thermal-annealing (RTA) MOSLED under a biased voltage of 85 V and a current density of 2.3 mA/cm^2 is preliminarily reported. Enhanced near-infrared (NIR) electroluminescence (EL) of a metal-oxide-semiconductor light emitting device (MOSLED) made on CO2 laser-annealed SiOx film is demonstrated. An EL power of near 50 nW from CO2 laser rapid-thermal-annealing (RTA) MOSLED under a biased voltage of 85 V and a current density of 2.3 mA/cm^2 is preliminarily reported.
出处 《Chinese Optics Letters》 SCIE EI CAS CSCD 2007年第10期601-601,共1页 中国光学快报(英文版)
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