高温快速退火对电子束物理气相沉积制备高硅硅钢片的影响

The effect of high temperature rapid annealing on preparation of high silicon electrical steel by EB-PVD

对电子束物理气相沉积高硅硅钢片进行了高温快速退火处理。用SEM,EDS,XRD对制备态硅钢片和热处理态组织,成分,物相进行了表征,并测试了其电阻率和磁滞回线。结果表面:高温快速退火使高硅硅钢片硅成分变均匀,靠近基板侧的相由Fe3Si变成DO3;硅钢片中孔长大,电阻率从90μΩ.m增大到160μΩ.m,矫顽力减小,磁感应强度减小。

The as-deposited high silicon electrical steel was processed using high temperature rapid annealing process. Microstructure,composition, phase of electrical steel deposited and heat treated were characterized by SEM,EDS,XRD and the electrical resistivity and magnetic loops were measured. The results showed that the distribution of silicon content in electrical steel heattreated became more uniform, the phase was transformed from Fe3Si to DO3 on the side close to substrate, the pores grew larger after heat treatment;The electrical resistivity increased from 90-160μΩ· cm, the coercive force decreased,the magnitude of magnetic induction intensity decreased.