集成电路版图中的多边形匹配比较研究

Design of polygon matching and comparison in IC layout

光学邻近校正是最重要的分辨率增强技术,而对光学邻近校正后的版图修正逐渐成为提高集成电路版图质量的必需步骤。提出了一种用于post-OPC版图(做过OPC的版图)修正的多边形匹配比较的线性算法。算法通过比较pre-OPC和post-OPC的版图,提取OPC校正时的分段信息和段偏移量,使得post-OPC版图的修正能够充分利用前次OPC的结果,避免了重做OPC,提高了OPC验证后修正的效率。

Optical proximity correction （OPC） is the most important RET and post-OPC fixing technique has become a necessary process to improve the OPC quality. A liner polygon matching and comparison algorithm for post-OPC fixing technique were presented. By comparing the pre-OPC and post-OPC layout, it recognized and recorded the fragmentation and offset information. Therefore the post-OPC fixing process can reuse the previous OPC result. By avoiding redoing OPC all-over again, the entire processing efficiency was highly improved.