摘要
一种基于UV-LIGA加工技术的双稳态电磁型RF MEMS开关,由于其结构使用了永磁体单元而使得开关在维持"开"或"关"态时不需要功耗,从而实现低功耗的电磁驱动.利用非接触式Wyko NT1 100光学轮廓仪所附带的动态测量系统(DMEMS),对开关的动态响应进行了测量.测量结果表明开关实现了双稳态驱动,开关实现状态完全切换到位对应的响应时间不到20μs.
Due to the use of permanent magnet in structure,a bistable electromagnetic radio frequency micro-electro-mechanical systems （RF MEMS） switch based on UV-LIGA technology requires no energy to remain at ＂on＂ or ＂off＂ state. And the electromagnetic actuation with low power consumption can be achieved. The dynamic characterization of the switch was successfully measured using DMEMS dynamic measurement system attached to wyko NT1 100 optical profiling system supplied by Veeco instruments Co. ,Ltd. The results of test showed that the bistable electromagnetic actuation is achieved, and the switching time is less than 20 μs.
出处
《华东师范大学学报（自然科学版）》
CAS
CSCD
北大核心
2007年第5期118-122,140,共6页
Journal of East China Normal University(Natural Science)
基金
国家863计划(2003AA404140)
信息产业部电科院预研(41308050116)
国家自然科学基金(60676047)
上海-应用材料研究发展基金(06SA11)
上海交通大学优秀博士学位论文基金
关键词
微电子机械系统
射频开关
双稳态
动态测量
micro-electro-mechanical systems
radio frequency switch
bistable
dynamic measurement
