摘要
应用迈克耳逊干涉仪原理,采用光电转换技术及条纹计数技术.实现了对较小位移的测量,结果表明,在一定的测量范围内,大大地提高了测量的精度.
Based on Michelson Interferometer Theory, by photoelectric transformation technology and fringe count, smaller position shift measuring is performed. As a result,accuracy ration is greatly improved to a certain extent.
出处
《松辽学刊(自然科学版)》
1997年第1期91-93,共3页
Songliao Journal (Natural Science Edition)