基于几何莫尔效应的剪应力传感器设计研究

Investigation of a Micro Shear Stress Sensor Using the Geometrical Moiré Effect

结合风洞检测剪应力对高灵敏度和高响应频率传感器的设计要求,提出了基于莫尔效应转化敏感元件位移的微型光栅式剪应力测量方式.针对传感器的机械灵敏度、线性度和谐振频率的应用要求对敏感元件进行设计,并在敏感元件结构设计尺寸的基础上对莫尔条纹灵敏度及其相位变化进行分析计算,完成微型光栅式剪应力传感器的结构设计流程.

An optical method of detection applicable to shear stress sensors, which were based on the geometrical Moiré effect has been presented. The Moiré pattern shift as a result of the displacement of the floating element of the sensor structure. The design of sensor structure linear and sensitivity,the dynamic response of the sensor,and the characteristic of the Moiré fringe pattern has been demonstrated. Designed results indicate a mechanical sensitivity of 0. 066μm/Pa, a resonant frequency of 8.16 kHz, and a Moiré amplification of 20.