摘要
根据傅里叶光学的相关理论对二维衍射光栅的频谱特性进行了分析,并对分析结果进行了模拟和实验验证;基于衍射光栅应用于微位移的理论,提出利用二维衍射光栅作为测量的基准元件,组成单个光源和单二维衍射光栅的二维平面微位移精密测量系统,并根据实验测量结果验证了这是一种具有纳米准确度的可行测量方法.
The Fourier method was employed to analyze the spectrum of 2-D diffraction grating,the induced results were simulated in Matlab, and the simulation was verified by the experimental photo.On the basic of these results,2-D diffraction grating used to measure 2-D displacements with high precision in nano-scale resolution, the structure using 2-D grating was given,interfere fringes were pictured,and the experimental results can meet the nano resolution measurement.
出处
《光子学报》
EI
CAS
CSCD
北大核心
2007年第4期726-729,共4页
Acta Photonica Sinica
基金
国家自然科学基金(50375011)
河南省杰出青年基金(02120001500)资助
关键词
测量
二维光栅
频谱分析
位移
measurement
2-D grating
spectrum analysis
displacement
