氮离子注入对锂硅酸盐玻璃晶化的影响

INFLUENCE OF NITROGEN ION-IMPLANTATION ON SURFACE CRYSTALLIZATION OF LITHIUM SILICATE GLASSES

Li_2O-SiO_2和Li_2O-ZnO-Al_2O_s-SiO_2玻璃样品在室温下注入1×10^(16),2.5×10^(16),5×10^(16)和1×10^(17)ions/cm^2(70—80keV)的N+离子,将注入和未注入的样品在析温度下进行热处理。用DTA、SEM、IRRS和X射线谱研究了注入和未注入玻璃的析晶,讨论了不同剂量对不同组成系统玻璃析晶的影响。

N^+ ions were implanted in samples of Li_2O-ZnO-SiO_2 and Li_2O-ZnO-A1_2O_3-SiO_2 glasses at doses of 1×10^(16), 2.5×10^(16), 5×10^(16) and 1×10^(17) ions/cm^2 (70—80keV) respectively at reom tmperature.The implanted and unimplanted glasses were heat-treated at crystal temperature. DTA, SEM, IRRS and X-ray diffraction analysis were used to study the morphology and crystal phases of implanted and unimplanted samples. The relationship between the degree of surface crystallization and implantation dose like a parabola with a maxium at the dose of 1×10^(16) ions/cm^2, the degree of surface crystallization decreases after this point. The effect of various doses on crystallization of different glasses is diseussed