光学薄膜膜厚自动控制系统的研究

Research of an Automatic System Monitoring Thickness of Optical Thin-Film

介绍了一种利用光电极值法同时控制规整膜系和非规整膜系的方法,利用VC++编写程序实现对光学监控信号的采集、处理及停镀点的自动判断,实现了规整膜系和非规整膜系膜层厚度的自动控制.并利用该膜厚自动控制系统实验制备了规整膜系和非规整膜系多层膜,实验结果表明:利用该系统镀制的薄膜重复性良好,且光谱曲线和理论光谱曲线吻合较好.该系统解决了非规整膜系的监控问题,由计算机控制膜层的停镀点,排除了人的主观因素对薄膜的性能及其制备的重复性产生的影响,提高了薄膜镀制的重复性和成品率.

A measurement which can monitor quarter wave and non-quarter wave coatings by optical turning point monitoring was introduced. The acquisition,processing of the optical monitoring signal and automatic judgment of termination point were achieved by programming with VC＋＋. Quarter wave and non-quarter wave coatings were made by the automatic monitoring system. Experiment results show that coatings made by the automatic monitoring system have good repetition, and the experimental transmittance spectra approached to the theoretical ones. The monitoring system can monitor the non-quarter wave coatings. Because the termination points of coatings are controlled by computer, influences caused by subjective factors can be eliminated. The repetition and rate of finished coating products are greatly increased.