坩埚下降法生长铌酸锂晶体(英文)

GROWTH OF LITHIUM NIOBATE CRYSTAL BY THE VERTICAL BRIDGMAN METHOD

采用坩埚下降法,生长了直径为5cm的铌酸锂晶体。探讨了晶体生长工艺条件,测试了晶体的透过光谱。所得晶体呈浅茶色,分析认为主要是氧空位缺陷所致。铌酸锂晶体通常用作声表面波(surface acoustic wave,SAW)器件的基片,氧空位缺陷可增加基片的电导率,减少器件制造过程中晶片开裂,有利于提高SAW器件成品率。

As a surface acoustic wave （SAW） substrate material, LiNbO3 crystal up to 5 cm in diameter was grown by the vertical Bridgman method. The growth parameters were optimized and the optical transmittance spectra of the LiNbO3 crystal were measured. The as-grown crystal shows a pale brown color, which was attributed to oxygen deficiency during the growth process. Oxygen deftciency produced in crystal may increase electric conductivity and reduce cracking of the LiNbO3 substrates, which is helpful to increase the yield of SAW devices.