电容式加速度计的表头结构设计与分析

On Structural Analysis of Capacitive Accelerometer

MEMS电容式加速度计具有灵敏度高、噪音低、漂移小、功耗低、结构简单等优点,有着广泛的应用前景。综合比较了电容式加速度计的三种常见结构的各自特点,指出了定齿偏置结构的梳齿式微机械加速度计的优点,并以该结构为分析对象,从加速度计的量程、稳定性、灵敏度等性能分析比较了多种结构梁,得出折叠梁的综合性能最好的结论,最后通过分析计算出了折叠梁在检测方向的刚度。

Capacitive accelerometer is characterized by high sensitivity, low noise, small drift, low power consumption and simple structure, presenting a wide application prospects. Features of three common structures of capacitive accelerometer were compared before pointing out the merits of finger-shaped micro-accelerometer of bias stationary structure. With the bias structure as an example~, various structural beams were compared from the range, stability and sensitivity of an accelerometer. A conclusion that the folding beams own the best overall performance was drawn and its measure rigidity was analyzed and calculated.