钕掺杂氧化锌薄膜的形貌表征与折射率测试

Study of Nd-doped ZnO Thin Films Surface Structure and Refractive Index

通过XRD和AFM分析了Nd掺杂ZnO薄膜的表面形貌,随着Nd掺杂量的增加,ZnO薄膜的结晶度变差,薄膜表面变得粗糙,晶格畸变增大。应用椭圆偏振仪测定了Nd掺杂ZnO薄膜的厚度及折射率,Nd掺杂量对ZnO薄膜的折射率有一定影响。

The morphology of Nd - doped ZnO thin films was analysed by XRD and AFM. The results indicate that, with increase of the Nd - doped, the Nd - doped ZnO thin films crystallinity became rough, the crystal lattice distortion increased. With the help the elliptical polarization instrument, we measured the Nd - doped ZnO thin films thickness and the refractive index, the results show that Nd- doped affects the ZnO thin films refractive index.