摘要
综述微电子技术的历史发展和重要地位,重点介绍其新材料和制备工艺的进展,新材料方面主要介绍几种重要的化合物半导体,并对其发展问题和前景进行展望。
The development history and function of modern microelectronic technology are summarized, and its new preparation methods and materials for microelectronic technology are introduced in the present paper. Several kinds of important compound semiconductor are introduced for the materials. Its future develop is prospected at last.
出处
《舰船电子工程》
2007年第5期7-10,共4页
Ship Electronic Engineering
基金
"863"计划项目(编号:2004AA32G090)
湖北省教育厅科研项目(编号:B200530002)
关键词
微电子
砷化稼
集成电路
纳米技术
microelectronic, GaAs, molectron(IC),namometer technology
