弓型梁静电硅微谐振器建模与实验

Modeling and Experiment of an Electrostatic Silicon Micro-resonators with Meander Suspension

根据梁的小变形理论和位移叠加原理,建立了弓型梁微谐振器的横向振动模型,得到了弓型复杂梁的变形方程和该类谐振器谐振频率的解析表达式。通过ANSYS软件的模拟分析,及对用体硅工艺制作的两种类型弓型梁谐振器的谐振频率实验实测,表明该谐振器的1阶横向谐振频率的计算值与实测值间的相对误差及ANSYS模拟值与实测值间的相对误差均小于3%,验证了所建模型的正确性。

Following the micro-deformation theory and the principles of displacement superposition, we establish the transverse oscilation model of an electrostatic micro-resonator with meander suspension and derive the analytical expressions of its resonance frequency and equations for the distortion of a complex meander suspension. The ANSYS simulation of and experiments on the resonance frequency of two types of resonator with meander suspension, which were fabricated with the silicon bulk micromachining process, indicate that both relative errors between simulation results and experimental values and those between calculation results and experimental results of the one-order transverse resonance frequency of the resonator are less than 3%, verifying that the model thus established is correct.