MEMS变形反射镜特性测试系统研究

Characteristics test system of MEMS deformable mirrors

为了实现对MEMS变形反射镜的静态形貌、动态离面变形及谐振频率的测量,提出了一种基于计算机控制的频闪显微干涉测量系统。测试中采用频闪照明技术及5步相移技术实现了对干涉相位的测量,利用空间及时间相位解缠算法恢复了反映物体真实信息的连续相位,从而得到了所需的特性参数。实验结果表明:该系统具有测量简便、自动化程度高及测量精度高等特点。

In order to measure static surface shape map and dynamic out-of-plane-deflection and resonant frequency of MEMS deformable mirrors, a computer-controlled stroboscopic micro-interferometer system is proposed. The techniques of stroboscopic illumination and a five-step phase-shifting interferometry are used to measure wrapped phase. The spatial and temporal phase unwrapping algorithms are applied to recover continuous phase corresponding to the object surface height. Subsequently,the needed characteristic parameters are obtained. The system has high measurement accuracy with simple method, and is controlled automatically.