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直径210mm氟化钙晶体的生长 被引量:4

Diameter 210mm Calcium Fluoride Crystal Growth
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摘要 采用Bridgman-Stockbarger法生长出直径为210mm的氟化钙晶体。透过率在紫外200nm处接近80%,红外透过率良好,可使用到9μm。通过对原有生长设备的改进,采用更为先进的温控设备和合理的温场控制条件,使生长区温场径向梯度小于0.5℃/mm,轴向生长温度梯度2~3℃/mm。整个生长过程分为:升温化料、熔体均一化、下降坩埚生长和初步退火过程,初退火温度为950℃,退火降温速率为15℃/h。 Diameter 210mm calcium fluoride crystal has been grown by Bridgman- Stockbarger method. In order to grow the crystal we have approved the equipment. The transmittance of the grown crystal at 200nm is about 80% in ultraviolet band, and the grown crystal can be used up to 9μm because of the good transmittance in infrared band. We used the more advanced temperature controller and made a more suitable temperature field condition. The radial gradient of temperature field was below 0.5℃/mm and axial gradient of temperature field was within 2-3℃/mm at the growing zone. The whole growing processes included raising temperature and melting, homogenate of melt, pulling the crucible and growing, and primary annealing. The annealing temperature was 950℃ and temperature descending rate was 15℃/h.
出处 《人工晶体学报》 EI CAS CSCD 北大核心 2007年第3期490-493,525,共5页 Journal of Synthetic Crystals
关键词 氟化钙晶体 Bridgman-Stockbarger法 温场 calcium fluoride crystal bridgman-stockbarger method temperature field
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参考文献7

  • 1Senguttuvan N,Aoshima M,et al.Oriented Growth of Large Size Calcium Fluoride Single Crystals for Optical Lithography[J].Journal of Crystal Growth,2005,280:462-466.
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  • 3Tetsuo Yonezawa,Kentaro Matsuob,et al.Behaviors of Trace Amounts of Metal-fluoride Impurities in CaF2 Single-crystal Grown by Stockbarger's Method[J].Journal of Crystal Growth,2002,236:236-289.
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