水热法制备Sm_2O_3微晶薄膜

Preparation of Sm_2O_3 Crystallite Thin Film by Hydrothermal Method

以氯化钐为起始原料,采用水热法在玻璃基板和Si(100)基板上制备了Sm2O3薄膜,研究了水热反应温度对薄膜晶相、显微结构和光学性能的影响。采用X射线衍射仪(XRD)、原子力显微镜(AFM)和紫外-可见自记式分光光度计等对薄膜的相组成、显微结构和光学性能进行了表征。结果表明:Sm2O3薄膜在玻璃基板和Si(100)基板上均表现出一定的定向生长的特征;Sm2O3薄膜对紫外线有强烈的吸收作用;随着反应温度从170℃升高到185℃,薄膜的结晶性变好,对紫外和可见光的吸收性均增强;薄膜禁带宽度由2.88eV增加到2.95eV。

Sm2O3 crystallites thin films were prepared on Si（100） and glass substrate by hydrothermal method using samarium dichloride as raw material. The influence of the hydrothermal temperature on the phases, microstructures and optical properties of the thin films was investigated. The as-prepared thin films were characterized by X-ray diffraction （XRD）, atomic force microscopy （AFM） and spectrophotometer. Results show that the surface of as-prepared Sm2O3 thin films are transparent to visible and infrared light, but exhibit an obvious absorbency to UV light. With the increase of hydrothermal temperature from 170℃ to 185℃, the crystallinity and optical properties of the prepared Sm2O3 thin film are improved; and the bandgap of the thin film increase from 2.88eV to 2.95eV.