生产用大型蒸镀设备真空系统的故障与诊断

FAULT AND DIAGNOSIS OF VACUUM SYSTEM OF LARGE EVAPORATION EQUIPMENT

以ＺＺＷ－Ｈ１４００Ⅱ大型真空蒸发镀膜设备为例，结合生产实际，详细介绍了设备真空系统常见故障与诊断。

By giving an example of the ZZW H1400Ⅱ evaporation equipment and combining the productive practice, the usual fault and diagnosis of the vacuum system of the equipment and the solving method have been particularly introduced in this paper.