摘要
用微机械加工技术和微电子平面工艺制备了微型Clark型氧电极。外型尺寸为15×2×07mm3,敏感面积为1×05mm2。在敏感区固定葡萄糖氧化酶(GOD),构成了微型葡萄糖传感器。传感器的主要性能:灵敏度22nA/(mmol/L);响应时间<1min,线性范围01~10mmol/L,变动系数97%,稳定响应在二十天以上。
A miniaturized Clark oxygen sensor with 15×2×0 7 mm 3 in size and 0 5×1 0mm 2 in sensing area was fabricated by micro machining technique and standard planar processing A glucose microsensor was developed by means of fixing GOD on the sensing area of the oxygen electrode It's sensitivity is 2 2nA/(mmol/L), response time <1 min, linear range 0 1~ 10 mmol/L, variation coefficient 9 7%, and life time > 20 days
出处
《功能材料与器件学报》
CAS
CSCD
1997年第2期109-113,共5页
Journal of Functional Materials and Devices
基金
中国科学院传感技术国家重点实验室
国家自然科学基金
关键词
微机械加工
微型氧电极
葡萄糖
生物传感器
Micro machining technique, miniaturized oxygen electrode, glocose microsensor