采用溅射法制备SrGa_2S_4:Ce薄膜

SrGa 2S 4:Ce BLUE EMITTING THIN FILM GROWN BY RF SPUTTERING

采用ＲＦ溅射技术制备了ＳｒＧａ２Ｓ４：Ｃｅ薄膜，并获得了发射波长为４４６ｎｍ的纯蓝色发光，其ＣＩＥ色坐标为ｘ＝０１４，ｙ＝００９。研究了ＳｒＧａ２Ｓ４：Ｃｅ薄膜的激发光谱和发射光谱，采用ＸＲＤ测定了薄膜的晶体结构，采用ＳＥＭ观察了薄膜的表面形貌。同时着重研究了后退火气氛、温度和时间对薄膜发光特性的影响。

SrGa 2S 4:Ce thin films have been grown by RF sputtering, which show pure blue photoluminescence with the peak wavelength of 446nm and CIE color coordinates of x=0 14, y=0 09 Excitation and emission spectra of SrGa 2S 4:Ce thin films have been studied The crystallinity and image of thin film are analyzed and observed using XRD and SEM respectively The effects of annealing conditions on luminescent characteristics are also studied