掩模管理的综合自动化控制系统的软件设计

Software design of integrated automation control system for photo mask management

介绍了基于欧姆龙CS1GH-CPU45H可编程逻辑控制器的掩模管理综合自动化控制系统的软件设计。该软件采用模块化设计方法和任务调用机制,简化了程序设计的过程,缩短了程序的扫描周期,提高了程序的运行效率。为了便于上位机监控设备运行状态,对执行机构的每个动作和过程进行了状态编码,程序将按照运行进程将状态编码、各个轴的当前位置和故障信息写到约定的数据区域中去。实验验证了该软件设计方法的可靠性和可行性。

The software design is discussed, based on the PLC ofCS 1GH-CPU45 from OMRON company, of the integrated automation control system for mask management. The software divided the whole flow of the mask management into several modules according to the art of the IC mask management. This module and task based design method simplified the design process, shortened the scanning period of the PLC, and increased the efficiency of the program running. In order to facilitate the master computer to monitor the running progress of the system, the software encoded every movement and process of the executives, and wrote the state codes, the position and malfunction information accordingly into the predefined data area in response to the program＇s running progress. Experiment verified the reliability and feasibility of this software design method.