溶剂、溶胶稳定剂和热处理对溶胶-凝胶法制备的ZnO薄膜微观结构的影响

EFFECTS OF SOLVENT,SOL STABILIZER AND HEAT TREATMENT ON THE MICROSTRUCTURE OF ZnO FILMS PREPARED BY SOL-GEL DIP COATING

采用溶胶-凝胶法,通过调整溶剂、溶胶稳定剂和热处理工艺在玻璃片上制备出不同工艺参数的ZnO薄膜.利用XRD和SEM考察了ZnO薄膜的择优取向和表面形貌.实验结果表明:采用高沸点溶剂时ZnO薄膜择优取向更强;单乙醇胺为稳定剂时ZnO薄膜择优取向很强,而二乙醇胺或三乙醇胺为稳定剂时择优取向微弱;预处理温度高于ZnO凝胶膜晶化开始温度时择优取向将减弱;最终处理温度在500℃以下时,随温度提高,晶粒尺寸增大,择优取向增强.

ZnO films have been prepared on glass by sol-gel dip coating. The preferential orientation and surface morphology were characterized by XRD and SEM, respectively. It can be concluded as follows： solvent with higher boiling point helps to obtain ZnO with stronger preferred orientation; MEA is quite effective in formation of ZnO films with strong preferred orientation, while DEA and TEA are not; the preferred orientation will be weakened, when the temperature of pretreatment which aimed to densify the gel films overlaps that of the crystallization of gel film; post-treatment at higher temperatures of 400-500 ℃will induce bigger grain size and stronger preferred orientation.