采用差分相位测量方法的MEMS运动表征系统

Dyanmic MEMS Characterization System Using Differential Phase Measurement Method

介绍了一种基于计算机控制的频闪干涉测试系统,用于测量可动微机电系统(MEMS)器件的离面运动,实现了nm级分辨力。系统采用五步相移高精度干涉测量方法,通过选择器件上的固定点作为参考点,实现差分测量模式,有效消除了随机误差的影响,提高了系统测量的重复性,10次测量的重复精度为3.17 nm。通过研究微谐振器的离面运动特性,说明该系统的强大功能。

A computer-controlled stroboscopic interferometer system is described in the paper to measure out-of-plane motions of micro electromechanical systems（MEMS） structures with nanometer resolution. This system introduces a five-step phase shifting interferometric measurement method with high accuracy and a differential measurement mode by choosing a fixed area on the device as the reference point,which eliminates the effect of random errors efficiently and improves the measurement repeatability of the system. The repeatability of 10 measurements is 3. 17 nm. The study on the dynamic behavior of a microesonator illustrates the powerful capabilities of the system.