摘要
以金属铟和结晶四氯化锡为原料,采用溶胶-凝胶工艺,用浸渍提拉法在石英玻璃基体上制备ITO透明导电薄膜。采用XRD,AFM,四探针电阻率仪,紫外分光光度计对薄膜的晶型结构,表面形貌,方电阻和透光率进行了测定和分析,研究了热处理温度和提拉层数对薄膜光电性能的影响。结果表明:随着热处理温度的升高,薄膜的方电阻显著降低,透光率也不断增大,但是当后处理温度大于750℃时,透光率略有降低,方电阻仍然降低。
ITO films were prepared on quartz glass by sol-gel dip-coating technique using metal ingots indium and hydrated stannic chloride as the raw materials. The microstructure and surface morphology of the films were analyzed by AFM and XRD. The sheet resistance and optical transmittance of the films were measured by using the four-point probe method and spectrophotometer. The effects of heat temperature and layers number on electrical and optical properties were also discussed. The results showed that the sheet resistance decreased and. transmittance in creased gradually with increasing of heat treatment temperature, but the transmittance slightly decreased when heated temperature was above 750℃.
出处
《稀有金属材料与工程》
SCIE
EI
CAS
CSCD
北大核心
2007年第10期1861-1864,共4页
Rare Metal Materials and Engineering
基金
国家高技术研究发展计划("863"计划)基金资助项目(2004AA303542)
