摘要
本文介绍了一种运用电荷耦合器件(线阵CCD)作为光电信息转换器件的高分辨率光电尺寸自动检测仪的基本工作原理。
The paper presents the principle of high resolution photoelectric automatic measuring instrument, using charge coupled device (CCD) as photoelectric signal transformer. Many advantages of the instrument are idenificated by experience.
出处
《光学技术》
CAS
CSCD
1997年第3期35-36,50,共3页
Optical Technique