三维相位展开算法在精密运动测试中的应用

Application of Three-Dimensional Phase Unwrapping Algorithm in Precision Motion Measurement

三维相位展开算法将基于空间的相位展开算法拓展到时间轴上,包含了一维时间和二维空间信息,适合于运动测试。通过建立一维时间相位展开算法的数学模型,分析了该算法运动测试的基本原理,讨论了在精密测试中的使用方法和适用范围,并对微谐振器的微结构进行运动测试。实验表明,算法在相位展开中引入时间信息,不仅消除了形变测量中需选取静止点为相位参考点或参考平面的限制,还可以同时测量物体表面某点纳米级的离面运动曲线和表面形变。

Three-dimensional phase unwrapping algorithm is an expansion of the spatial phase unwrapping algorithm in time, which contains one-dimensional temporal and two-dimensional spatial information and is very useful for motion measurement. Firstly, mathematic formula of one-dimensional temporal phase unwrapping algorithm is introduced in this paper. Then, the working principle, limitation conditions and the process of the new algorithm are discussed for precise measurement of micro-motion. In final, the micro-structure motion of micro-oscillators is measured. The results show that the new algorithm, due to time information taken into consideration, not only gets rid of the request for static reference point or reference plane for distortion measurement, but also achieves off-plane motion in the level of nanorneter while surface distortion is measured at the same time.