互补金属氧化物半导体图像传感器亚像元细分精度实验研究

Sub-Pixel Measurement Accuracy Experiment of Complementary Metal Oxide Semiconductor Imager

通过图像处理方法,用软件的方式（亚像元细分）对目标进行定位是一个可有效提高测量精度的途径。主要对互补金属氧化物半导体（CMOS）图像传感器亚像元细分精度的测试方法和测试结果进行研讨。利用压电陶瓷（PZT）精密快扫振镜（FSM）和基于互补金属氧化物半导体图像传感器OV7620的数字相机构建了实验系统,对该互补金属氧化物半导体图像传感器OV7620的亚像元细分精度进行了实验研究。结果表明,OV7620的质心定位精度达到0.17pixel,即能够实现六细分,互补金属氧化物半导体图像传感器具有实现亚像元细分的能力,能够应用于以光斑质心检测为手段的测量系统中。

The sub-pixel measurement technique based on image processing technique and software design technique, is a good choice for the improving of measurement precision. The measuring technique and results of sub-pixel measurement accuracy of complementary metal oxide semiconductor （CMOS） imager are researched in this paper in order to give references for correlative systems. A test system based on high precision piezoelectric translator （PZT） fast-steening mirror （FSM） and OV7620 CMOS imager based digital camera is constructed, several sub-pixel measurement accuracy experiments for the CMOS imager are taken. The results indicate that sub-pixel measurement accuracy is about 0.17 pixel, it is of great importance to consider the influence of the fill-factor on sub-pixel measurement accuracy. According to the results above, CMOS imager has the capability to achieve sub-pixel measurement accuracy, and can be widely used in many measuring systems which count on facula centroid sub-pixel interpolation .