疏水疏油二氧化硅增透膜的制备

Preparation of Hydro-oleophobic Silica Antireflective Coating

以正硅酸乙酯为前驱体,氨水为催化剂,采用溶胶-凝胶法,结合全氟辛基癸烷三甲氧基硅烷(FAS)自组装对膜层表面改性,制备了疏水疏油二氧化硅增透膜.采用红外光谱仪,分光光度计,扫描探针显微镜,椭偏仪,静滴接触角测量仪,抗油污染能力测试等技术对膜层性质进行了分析.结果表明:疏水疏油增透膜的峰值透光率为99.8%;与水的接触角为118.0°,与二甲基硅油的接触角达到74.5°;在抗油污染能力测试中,疏水疏油增透膜的抗油污染能力较常规增透膜大大增强。

Using tetraethoxylsilane as precursor, ammonia as catalyst, the hydro-oleophobic antireflective coating was prepared by sol-gel process along with fluoroalkylsilane self-assembly. The properties of the coatings were characterized with spectrophotometer, scanning probe microscope, spectroscopic ellipsometry, contact angle measurement and oil-resistant test. The results indicate that the peak transmittance of the hydro-oleophobic coatings is 99.8%, water contact angle is 118.0°, and polydimethyl siloxane oil angle is 74.5°. The oil-resistant test shows that the oil-resistant ability of the hydro-oleophobic silica antireflective coating is considerably improved compared with that of the common silica antireflective coating.