表面活性剂对制备石英管薄膜电阻的影响

Effects of surfactants on preparation of quartz tube resistive films

研究在复合电沉积过程中不同表面活性剂对镀层粒子SiO2含量、镀层形貌及电阻率的影响。用扫描电镜、X射线衍射、能谱等手段对镀层表面形貌、微观结构进行检测,并且使用万用电表和SDHC型数字点式测量仪对表面电阻率进行分析测量。实验结果表明,非离子和阳离子表面活性剂的联合使用有利于粒子和基质金属的共沉积,当非离子表面活性剂质量浓度为0.02 g/L,阳离子表面活性剂质量浓度为0.08 g/L时,镀层的微粒含量为3.53%,其电阻率为5.723 kΩ.μm,且表面形貌较好。

Effects of various surfactants during the process of composite electrodeposition on particle content, morphology and resistivity of coating were investigated. The surface morphology and microstructure were observed by scanning electron microscope （SEM）, X-ray diffraction （XRD） and energy dispersive X-ray spectroscope （EDX）, the surface resistivity was analyzed by avometer and SDHC digital. The results show that combination of non-ionic and cation surfactants is useful for codeposition of particles and basal metals. Higher particle content and resistivity of coating are 3.53% and 5.723 kΩ·μm when the contents of non-ionic and cation surfactants are 0.02 and 0.08 g/L, respectively.