高Q值音叉式微陀螺静电自激驱动研究

Study on electrostatic self-excited driving for tuning fork micromachined gyroscope with large Q value

为了提高检测精度,对研制的具有滑膜阻尼的音叉式微机械陀螺采用静电自激驱动方式,它能够使驱动振动自动稳定在驱动模态的固有频率上,并保持恒定的驱动振动速度幅度。分析了静电自激驱动电路工作原理,采用自动增益控制(AGC)设计制作了相应的检测电路,实现了Q值为325、谐振频率为2.04 kHz微陀螺的闭环恒幅自激振动。

In order tn improve detection precision,electrostatic self-excited driving mode is presented for tuning fork micromachined gyroscope fabricated with slide-film damping,which enables driving motion to oscillate stably with natural frequeney of driving mode and keep steady amplitude of driving oscillation＇ s velocity. The principle of electrostatic self-excited driving is analyzed, related detecting circuits is designed and fabricated by automatic gain control（AGC） and ctosed-lnop self-excited driving is performed for the gyroscope with the Q value of 325 and resonamce frequeucy of 2.04 kHz.