基于Parylene的柔性神经微电极的研制和表征

Development and characterization of flexible Parylene-based neural microelectrodes

衬底集成的微电极是植入式微系统中的重要部件，起着对神经进行电刺激并记录神经信号的关键作用。采用微细加工技术在新型柔性基底一聚对二甲苯（Parylene）上制作微电极阵列。阐述了Parylene基微电极阵列的加工工艺，并利用光学显微镜和电化学表征技术对微电极的表面形貌和电学性能进行了研究。结果表明：在工作频率范围内（10^4-10^5Hz），柔性神经微电极的阻抗值低（400-1000Ω），相位延迟小（-20°），适于用作视网膜修复。

Substrate-integrated electrodes are the key components in implantable microsystems for recording of neural signals or electrical stimulation of nerves. A micro fabrication technique is introduced to fabricate muhielectrode arrays based on a new flexible substrate-Parylene. The process technology for Parylene-based microelectrode arrays is described. Surface topography and electrical properties of the microelectrodes are characterized by optical microscope and electrochemical method. The result indicates that in the working frequeney （10^4-10^5Hz）, the impedance is low （400 -1 000Ω） , and the phase angle is small （ -20°） , which is suit for the application of retinal renovation.