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一种基于MEMS工艺的二维风速传感器的设计 被引量：4

Design of a 2D Thermal Wind Sensor Based on MEMS Process
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摘要 给出了一种基于MEMS工艺的二维热风速传感器的设计、制造以及测试结果.该传感器采用恒功率工作方式,利用热温差的方法测量风速和风向.本传感器采用MEMS剥离工艺在玻璃衬底上同时加工出加热电阻和测温电阻,利用简单可靠的加工工艺实现了热隔离和高灵敏度.经过风洞风速风向测试,得知传感器的风速量程超过10m/s,360°范围内风向测量误差不超过8°.传感器的响应时间不超过1s,功耗为10mW. The design, fabrication,and test results of a 2D thermal wind sensor are presented. The wind sensor measures wind speed and direction by calorimetric principle in constant power mode. Heater and detector resistors are fabricated on glass substrate using a lift-off process. The fabrication is simple and reliable, and good thermal isolation and high sensitivity are achieved. The sensor can detect wind speed in the range of 10m/s and flow direction over 360° with an error of less than 8°. The response time of the sensor is less than ls,and the heat power is 10mW.
作者 沈广平 吴剑 张骅 秦明 黄庆安
机构地区 东南大学MEMS教育部重点实验室
出处 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2007年第11期1830-1835,共6页 半导体学报（英文版）
基金 国家自然科学基金资助项目(批准号:90607002)~~
关键词 MEMS 剥离工艺 风速 风向 流量传感器 MEMS lift-off process wind speed wind direction flow sensor
分类号 TP212 [自动化与计算机技术—检测技术与自动化装置]
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参考文献16

  • 1Makinwa K K A.Flow sensing with thermal sigma-delta modulators.PhD Thesis,Deift University of Technology,2004:95.
  • 2Moser D,Baltes H.A high sensitivity CMOS gas flow sensor on a thin dielectric membrane.Sensors and Actuators A,1993,37/38:33.
  • 3Mayer F,Haberli A,Jacobs H.Single-chip CMOS anemometer.Electron Devices Meeting,Hong Kong,1997:895.
  • 4Yoon E,Wise K D.An integrated mass flow sensor with onchip CMOS interface circuitry.IEEE Trans Electron Devices,1992,39(6):1376.
  • 5Huang Qing'an,Qin Ming,Zhang Zhongping,et al.Weather station on a chip.Proceedings of IEEE,2003,2:1106.
  • 6Gao Donghui,Qin Ming,Chen Haiyang.A self-packaged thermal flow sensor by CMOS MEMS technology.Proceedings of IEEE,2004:879.
  • 7Sun Jianbo,Qin Ming,Huang Qing'an.Flip-chip packaging for a two-dimensional thermal flow sensor using a copper pillar bump technology.IEEE Sensors Journal,2007,7(1):990.
  • 8Shen Guangping,Qin Ming,Huang Qing'an.SPICE model with lumped circuit for thermal flow sensor.IEEE Sensors,2006:1444.
  • 9Mayer F,Salis G,Funk J,et al.Scaling of thermal CMOS gas flow microsensors:experiment and simulation.MEMS,1996:116.
  • 10Kim Seunghyun,Kim Sunghyun,Kim Yongduk.Design and fabrication of a flow sensor detecting flow direction and velocity.Transducers,Boston,2003,2:1927.

二级参考文献6

  • 1Makinwa K A A,Huijsing J H,Hagedoorn A.Industrial design of a solid-state wind sensor.Proceedings of the First ISA/IEEE Conference,2001:68
  • 2Mayer F,Haberli A,Jacobs H,et al.Single-chip CMOS anemometer.Technical Digest of Electron Devices Meeting,1997:895
  • 3Kim S U,Kim S,Kim Y,et al.Design and fabrication of a flow sensor detecting flow direction and velocity.12th Innational Conference on Transducers,Solid-State Sensors,Actuators and Microsystems,2003,2:1927
  • 4Mayer F,Salis G,Funk J,et al.Scaling of thermal CMOS gas flow microsensors:experiment and simulation.Proceedings of An Investigation of Micro Structures,Sensors,Actuators,Machines and Systems,1996:116
  • 5Matova S P,Huijsing J H.Three dimensional computer model of a smart wind sensor.Proceedings of SeSens,2001:834
  • 6Van Oudheusden B W.The thermal modeling of a flow sensor based on differential convective heat transfer.Sensors and Actuators A,1991,29:93

共引文献5

同被引文献33

引证文献4

二级引证文献27

Journal of Semiconductors
2007年 第11期

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