金刚石薄膜品质及其表征

QUALITY OF THE DIAMOND FILM AND ITS CHARATERIZATION

阐述了金刚石薄膜中成分、结构、夹杂尤其是化学与结构缺陷对热、电、光学、机械、化学性质的影响.介绍了薄膜品质检测、表征方法的新进展.表明品质表征有向点缺陷类别及其浓度分布、掺杂和偏折方向深入的趋势．为了控制品质、增强薄膜特性、开发新的器件，必须探求更完善的分析方法建议在SEM－WDCL（阴极荧光扫描电子显微分析装置）上，在确保‘CL’（阴极荧光）最高收集效率条件下，力求不降低原有SEM的空间分辨率；在‘CL’谱对杂质有很高灵敏度基础上完善定量分析能力，结合数字图象分析，取得了膜中缺陷、掺杂。

In this paper, the effects of composition, structure, inclusion, especilly chemical and structural defects of diamond films on the thermal, electronic, optic, mechanic and chemical properties have been ex-pounded. The new progress of analysis and characterization methods for film guality has been introduced. It has been shown that the studing tendency of deeply develops toward the type and concentration distribution of defects, as well as doping and segregation.It is necessary to reseasch more perfect analytical method, in order to control quality of films, enchance the properties of films and develop new device. Authors suggest that under the condition of ensuring highest collectve emcience of' CL' (cathodoluminescence) in SEM-WDCL(cathodoluminescence Scanning Elec-tron Microanalysis Equipment), the original spstial resolution of SEM can not be reduced as much as possi-ble; On the basis of 'CL' spectra having high sensitivity for dopant, the ability of quantitative analysis should be perfected, at the same time, combining SEM-WDCL with digital image analysis technology, these infor-mation of the distribution statistics of defects doping and segreqation, and even the non-diamond canbon can be obtained.