化学汽相沉积金刚石薄膜的生长

GROWTH PROCESS FOR DIAMOND THIN FILMS

利用热丝化学汽相沉积法生长出优异的金刚石薄膜.研究表明，金刚石的成核依赖于沉积点的尖锐度，薄膜的生长包括晶粒长大和薄膜上的二次成核及其生长，可用分层生长来描述．金刚石晶粒的生长由外延生长和二次成核及其生长组成，也是分层进行的．结果导致了金刚石晶体和薄膜的层状结构．

High quality diamond thin films were grown by hot finament chchcal vopr dopsition.Their microstructure and growth processes were studied by means of high-magnification scatring clectron miorosoopy. The study showed that nucleation of diamond was detetrined mainly by the sharp degree of deposition sites. The growth of diamond thin films consisted of growth of primary diamond nuleus, second nucleation and their growth onto the diamond thin films, can be described by gradahonal growth. The growth processes of diamond particles consisted of the epitaxial growth stage and second nucleation and their growth stage, can also be decribed by gradational growth. Gradational growth leaded to larer up layer struc-ture of diamond particles and thin filIns because of second nucleation and their growth.