线性输出的气体粘滞力式流量传感器

Shear Stress Target Flowmeter with Linear Output

提出了一种有线性输出的靶式流量计．它利用压阻式传感器来测量流体作用在靶面上的粘滞力，从而进行流体流量的测量．试验结果表明，在较低的流速范围内，传感器的输出和流速间为线性关系．文章还分析了由于流体粘性系数随温度的变化而对传感器输出的影响及解决方法．

The paper presents a new design of target flowmeter with linear output. A piezo resistance type sensor is used to measure the shear stress exerted on the plate by the fluid to determine the flow rate. The experimental results show a good performance of measuring average velocity of air flow in a low velocity range. The effect of the temperature on the flowmeter output is analysed, and some methods have been presented to solve the problem.