砂轮约束磨粒喷射加工表面自相关性及功率谱分析

Self-Correlation and PSD Analysis of Surface Lapping with Abrasive Jet Flow Restricted by Grinding Wheel

磨粒喷射精密光整加工是重要零件在磨削后进行去除表面缺陷层、降低粗糙度和波纹度为目的的光整加工新工艺．试验在M7120磨床上完成，加工试样为Ra=0．2～0．6μm的#45钢，加工表面形貌和微观几何参数用SEM和TR200表面轮廓仪测量．应用随机过程中的相关性从自相关、功率谱密度函数两方面对磨削表面和光整加工表面进行了研究．分析结果表明，该加工方法明显提高了工件的表面质量，降低了工件的表面粗糙度并均化了波纹度．

The aim of abrasive jet flow finishing process as a new lapping technology is to remove further the surface defect layer and diminish roughness and ripple. Experiments were performed on a plane grinder M7120 with a #45 steel workpiece as specimen of which the surface roughness values of R, = 0.2-0.6 μm. The micromorphology of machined surface was observed using SEM with the microcosmic geometry parameters measured by TR200 profilometer. With the correlation in stochastic process applied to the experimental results, the surface during grinding and further lapping with liquid abrasive jet flow restricted by grinding wheel was investigated with respect to self-correlation and PSD（power spectra density） analysis. The results indicated that such a new finishing process can diminish and equilibrate roughness and ripple of ground surface to improve greatly the surface quality.